Electronics & Optics Solar Cleanroom Construction

The production process of its main supporting facilities includes:

1. Different grades of purification workshop compartments corresponding to the stages from silicon wafer preparation to etching and printing of device production are divided into Class 1K and 10K sub-products with different cleanliness requirements.

2. Production processes related to epitaxial wafers, chips and packages;

3. The technological process of solar cells is as follows: loading → ultrasonic cleaning → texturing → deionization cleaning →IPA dehydration → diffusion → plasma edge etching → dephosphorization of silicon glass →IPA dehydration →PECVD→ motor sintering → classification detection → packaging and warehousing.

4. Production supporting systems such as compressed air, special gas, organic exhaust, acid-base exhaust, hot exhaust, process cooling water, vacuum and pure water;

According to different process intervals, purification workshop with different purification grades should be set to distinguish the connection and separation of different purification compartments, the pressure difference between different compartments and the airflow direction. The flow direction of people and logistics shall be rationally divided according to the production process, which not only meets the production habit, but also saves energy and protects the environment.

According to the above process, we take relevant measures in the automatic control of air conditioning in the purification system. The fresh air units (MAU-1, 2) adopt variable frequency fans, and the static pressure sensor on the main air supply pipe controls the frequency converter. Electric regulating valves are installed on the fresh air pipes connected to each AHU. The opening of the electric regulating valves is adjusted by the positive pressure value of each clean room, so that the positive pressure value of the clean room does not change with the change of the exhaust air volume of production equipment. The change of the opening of the electric regulating valves causes the static pressure change on the main air supply pipe, and the fan frequency of AHU-1 and AHU-2 is adjusted according to its set value to achieve the control purpose. It is realized by temperature and humidity control and cooling system control of purification workshop.

1. Temperature and humidity control in purification workshop: the humidity in purification workshop is guaranteed by the fresh air unit MAU, which controls the air supply status of the fresh air unit, and adjusts the opening of the electric actuator of humidifier, the electric two-way valve on the surface cooler and the heater return pipe according to the set value of the air supply status. Dew point temperature DPT is adjusted by feedback of humidity sensitive element HE in the inspection room. The temperature of the purification workshop is ensured by combining the air cabinet with the sandwich coil, and the opening of the electric two-way valve on the return pipe is adjusted according to the indoor temperature.

2. Control of cooling system: the chilled water system uses chilled water pump to supply water, and the load control method is used to determine the number of water chillers, corresponding water pumps and cooling towers. According to the set water pressure difference between water supply and water return, the opening and closing degree of pressure difference flow bypass valve between water supply and water return main pipes can be automatically controlled.